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On the spatial resolution of uncoated optical-fiber probes in internal reflection near-field scanning optical microscopy

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Güngör, Ali

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Atia, Walid A.
Pilevear, Saeed
Davis, Christopher C.

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Elsevier

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Abstract

We present conclusive experimental quantitative evidence of the resolution limit of uncoated optical fiber probes in the internal reflection mode. Additionally, we present a new technique for unambiguously determining the resolution of a near-field scanning optical microscope without topographical influences. A sample with nearly no topography but with a large dielectric step junction was created by evaporating a thin chromium layer on a silicon wafer and subsequently cleaving the wafer. The cleaved edge is then scanned over the step junction, allowing a quantitative determination of the lateral resolution without topographical influences.

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Bu çalışma, 9-13 Şubat 1997 tarihlerinde İsrail'de düzenlenen 4. International Conference on Near-Field Optics and Related Techniques'de bildiri olarak sunulmuştur.

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Keywords

Microscopy, Samples, Probes, Reflection, Silicon wafers, Near field scanning optical microscopy, Optical fiber probes, Optical microscopy

Citation

Atia, W. A. vd. (1998). "On the spatial resolution of uncoated optical-fiber probes in internal reflection near-field scanning optical microscopy". Ultramicroscopy, 71(1-4), 379-382.

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