Publication: On the spatial resolution of uncoated optical-fiber probes in internal reflection near-field scanning optical microscopy
Date
Authors
Güngör, Ali
Authors
Atia, Walid A.
Pilevear, Saeed
Davis, Christopher C.
Advisor
Language
Publisher:
Elsevier
Journal Title
Journal ISSN
Volume Title
Abstract
We present conclusive experimental quantitative evidence of the resolution limit of uncoated optical fiber probes in the internal reflection mode. Additionally, we present a new technique for unambiguously determining the resolution of a near-field scanning optical microscope without topographical influences. A sample with nearly no topography but with a large dielectric step junction was created by evaporating a thin chromium layer on a silicon wafer and subsequently cleaving the wafer. The cleaved edge is then scanned over the step junction, allowing a quantitative determination of the lateral resolution without topographical influences.
Description
Bu çalışma, 9-13 Şubat 1997 tarihlerinde İsrail'de düzenlenen 4. International Conference on Near-Field Optics and Related Techniques'de bildiri olarak sunulmuştur.
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Keywords:
Keywords
Microscopy, Samples, Probes, Reflection, Silicon wafers, Near field scanning optical microscopy, Optical fiber probes, Optical microscopy
Citation
Atia, W. A. vd. (1998). "On the spatial resolution of uncoated optical-fiber probes in internal reflection near-field scanning optical microscopy". Ultramicroscopy, 71(1-4), 379-382.