A method of precise calibration for piezoelectrical actuators

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dc.contributor.authorCanel, Timur
dc.contributor.buuauthorBektöre, Yüksel
dc.contributor.departmentUludağ Üniversitesi/Fen-Edebiyat Fakültesi/Fizik Bölümü.tr_TR
dc.date.accessioned2020-08-04T10:53:56Z
dc.date.available2020-08-04T10:53:56Z
dc.date.issued2004
dc.description.abstractPiezoelectrical actuators are very useful for making translations over distance less than 10 µm. One of the most important applications of such piezo actuators is the scanning tunnelling microscopy and the related scanning probe microscopies because atomic scale distances have to be measured and controlled in scanning probe microscopies applications. Especially, tube shaped piezoelectrical actuators have been widely used for such purposes. In this study, a piezotube scanner is calibrated at three stages. First calibration was done by using interferometer. At the other two stages Scanning Tunnelling Microscope was used for measurement.en_US
dc.identifier.citationCanel, T. ve Bektöre, Y. (2004). "A method of precise calibration for piezoelectrical actuators". Uludağ Üniversitesi Mühendislik-Mimarlık Fakültesi Dergisi, 9(1), 147-152.tr_TR
dc.identifier.endpage152tr_TR
dc.identifier.issn2148-4147
dc.identifier.issue1tr_TR
dc.identifier.startpage147tr_TR
dc.identifier.urihttps://dergipark.org.tr/tr/download/article-file/202856
dc.identifier.urihttp://hdl.handle.net/11452/11823
dc.identifier.volume9tr_TR
dc.language.isoenen
dc.publisherUludağ Üniversitesitr_TR
dc.relation.collaborationYurt içitr_TR
dc.relation.journalUludağ Üniversitesi Mühendislik Dergisi / Uludağ University Journal of The Faculty of Engineeringtr_TR
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergitr_TR
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectSTMtr_TR
dc.subjectPiezoelectricen_US
dc.subjectCalibrationen_US
dc.subjectInterferometeren_US
dc.subjectKalibrasyontr_TR
dc.titleA method of precise calibration for piezoelectrical actuatorsen_US
dc.typeArticleen_US

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2004 Cilt 9 Sayı 1